As an indispensable indicator in the development of optical components, laser-induced damage threshold (LIDT) is still the direction of research to improve the accuracy of its measurement results. In this paper, an optimal allocation method of damage test points based on Monte Carlo method is proposed to improve the accuracy of LIDT fitting results. According to the limited irradiation test area and irradiation spot size of the test sample, a nonlinear degenerate defect damage model is simulated, and the sensitivity analysis of the influence of test points change on the fitting LIDT results at different fluence levels is analyzed. Then, according to the setting parameters of damage model, a model is established to generate relevant damage data. The number of test points at each specified fluence level is changed by the control variable method, with the number of test points unchanged at the rest of the fluences.The Monte Carlo method is used to perform multiple simulation calculations on all damage data. The relationship curve between the standard deviation of the fitting results and the test points is drawn, so as to calculate the sensitivity of the corresponding test points to the standard deviation of the damage threshold fitting result. Finally, a more reasonable allocation of test points under each fluence is carried out with this sensitivity as the weight. The results show that the standard deviation of the fitting result of the sensitivity weight method is 0.272 J/cm², which is about 31% lower than the standard deviation of 0.395 J/cm² in the standard distribution method.