Acta Optica Sinica, Volume. 25, Issue 12, 1722(2005)
Fabrication of Soft X-Ray Phase Condenser Zone Plates
Soft X-ray zone plate is an important element which has the function of concentration, dispersion and imaging in soft X-ray optics. An Au condenser phase zone plate mask is fabricated using holography and ion beam etching process. Soft X-ray Ge and Ni condenser phase zone plates are fabricated by ion-beam etching technology on polyimide substrate and contact synchrotron radiation lithography with the mask.
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[in Chinese], [in Chinese], [in Chinese], [in Chinese]. Fabrication of Soft X-Ray Phase Condenser Zone Plates[J]. Acta Optica Sinica, 2005, 25(12): 1722