Optics and Precision Engineering, Volume. 21, Issue 7, 1811(2013)
Large stroke 2-DOF nano-positioning stage with angle error correction
On the basis of a macro-micro dual driven method, a solution for the large stroke 2-DOF nano-positioning stage with angle error correction functions is proposed to reduce the measurement errors in a precision measurement system caused by positioning and angular errors of the stage. Firstly, the principle of the solution is demonstrated. In this solution, the macro stage and micro stage share the same position feedback systems to form a closed loop control, and both linear positioning errors and angle errors of macro stage are compensated with the help of a 6-DOF micro stage based on a piezoelectric ceramic actuator and a flexible hinge. Then, the macro stage and micro stage are designed and manufactured based on the solution. Finally, the performance of the 2-DOF nano-positioning stage with error correction functions are tested preliminarily. Experimental result indicates that the stroke of the 2-DOF nano-positioning stage reaches 200 mm×200 mm. With the correction of the micro stage under the closed-loop control, all of the angle errors of the stage are reduced from hundreds of seconds to less than 10″, and the positioning error is reduced from 3 μm to less than 25 nm. Experimental result verifies the effectiveness of the macro-micro dual positioning system.
Get Citation
Copy Citation Text
ZHANG Xi-feng, HUANG Qiang-xian, YUAN Yu, HUANG Shuai. Large stroke 2-DOF nano-positioning stage with angle error correction[J]. Optics and Precision Engineering, 2013, 21(7): 1811
Category:
Received: Jan. 6, 2013
Accepted: --
Published Online: Aug. 5, 2013
The Author Email: Xi-feng ZHANG (zhangxf_hfut@163.com)