Acta Photonica Sinica, Volume. 46, Issue 1, 123003(2017)
Research on Large Size MEMS Scanning Mirror Driven by Electromagnetic
Based on the Micro Electronic Mechanical System(MEMS) processing, a large size 2-D scanning mirror driven by electromagnetic force was designed and implemented. Two different driving methods were compared, and the method of dipole driving was chosen because of its higher torque. Meanwhile, the static response and dynamic response of the device were analyzed by using finite element simulation, the simulation results matched with the measurement data of the device. The fabrication and packaging steps for the MEMS mirror were described in details, and the mirror was fabricated. The testing results show that when the driving current reaches 120 mA, the MEMS mirror has static titling angles of ±4.5° and ±5° along slow axis and fast axis respectively. The scanning resonant frequency for the mirror along slow axis is 348 Hz, and 660 Hz along fast axis. Finally, the MEMS mirror was used in laser display system to reduce the laser speckle, the speckle contrast can be reduced to 4.2%, and the image quality of a laser display system can be greatly improved with the MEMS mirror.
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HE Jia-hui, ZHOU Peng, YU Hui-jun, SHEN Wen-jiang, SI jin-hai. Research on Large Size MEMS Scanning Mirror Driven by Electromagnetic[J]. Acta Photonica Sinica, 2017, 46(1): 123003
Received: Aug. 1, 2016
Accepted: --
Published Online: Feb. 9, 2017
The Author Email: Jia-hui HE (jhhe2014@sinano.ac.cn)