Acta Photonica Sinica, Volume. 48, Issue 2, 223001(2019)

Design and Measurement of CMOS Terahertz Thermal Detector with Gate-antenna and NMOS Transistors

LI Zi-meng*, YANG Jiao, and CHEN Fei
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    A structure of thermal terahertz detector working at room temperature was proposed. The detector is consisted of an on-chip antenna and a temperature sensor. The antenna made of gates of the temperature sensor absorbs incident terahertz wave and converts it to Joule heat. The heat-generated temperature rise is then detected by the temperature sensor. The working flow of the detection can be divided into three parts: electromagnetic absorption, thermal-heat conversion and thermal-electrical conversion. Modeling and simulation of every process are presented. The simulated Antenna absorptivity is 0.897, the heat transfer efficiency is 165 K/W and the thermoelectric conversion efficiency is 1.77 mV/W. The detector is designed based on 0.18 μm CMOS technology with post-process thinning the silicon substrate to 300 μm. Its simulated voltage responsivity is 262 mV/W at 3 THz frequency, while the tested value is 148.83 mV/W under the incident power of 1mW.

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    LI Zi-meng, YANG Jiao, CHEN Fei. Design and Measurement of CMOS Terahertz Thermal Detector with Gate-antenna and NMOS Transistors[J]. Acta Photonica Sinica, 2019, 48(2): 223001

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    Paper Information

    Received: Nov. 9, 2018

    Accepted: --

    Published Online: Mar. 23, 2019

    The Author Email: Zi-meng LI (lzm_tju@tju.edu.cn)

    DOI:10.3788/gzxb20194802.0223001

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