Acta Optica Sinica, Volume. 12, Issue 6, 511(1992)
A high power, high repetition rate KrF excimer laser with narrow spectrum width
A KrF resonator-amplifier excimer laser system using for submicro fine processing was reported. This system can operate in the situation of 200 Hz repetition rate with output power of 24.4 W and spectrum of 2.3×10-3 nm. Its spectrum drift is less 5×10-4 nm during operation.
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[in Chinese], [in Chinese]. A high power, high repetition rate KrF excimer laser with narrow spectrum width[J]. Acta Optica Sinica, 1992, 12(6): 511
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