Chinese Journal of Lasers, Volume. 20, Issue 11, 853(1993)
A laser scanning deposition method for large area superconducting films
In this paper, a laser scanning deposition method for large area superconducting films is presented. Using a optical transmission system to make the laser beam to scan on the superconducting target with different radii rotation and to ablate it for depositing large area superconducting films. The results show that film thickness uniform areas enlarge about 10 times using this method.
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[in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese]. A laser scanning deposition method for large area superconducting films[J]. Chinese Journal of Lasers, 1993, 20(11): 853
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