High-precision noncontact position measuring system

Optics and Precision Engineering, Volume. 10, Issue 1, 41(2002)

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[in Chinese], [in Chinese], [in Chinese]. High-precision noncontact position measuring system[J]. Optics and Precision Engineering, 2002, 10(1): 41

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Received: Feb. 26, 2001

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Published Online: Sep. 18, 2007

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