Infrared and Laser Engineering, Volume. 48, Issue 1, 102001(2019)
Research development about room temperature terahertz detector array technology with microbolometer structure(invited)
Terahertz(THz) detector with thermal sensitive microbolometer structure indicates many prominent features, such as wide band detecting region, large array pixels, high integrated device, real-time imaging, comparing with some other room-temperature THz technologies. Microbolometer structure using VOx thin film as sensitive material has been successfully fabricated uncooled infrared focal plane array detector, but unsuitable for THz detection for very low THz wave absorption ratio. So some special design should be presented in the microbolometer structure to achieve high performance THz detector. Room-temperature THz technologies and development of microbolometer type THz detector array were introduced in this article briefly, and also the research about THz absorption material or structure in University of Electronic Science and Technology of China was presented in the paper.
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Wang Jun, Jiang Yadong. Research development about room temperature terahertz detector array technology with microbolometer structure(invited)[J]. Infrared and Laser Engineering, 2019, 48(1): 102001
Category: 邀请报告
Received: Aug. 18, 2018
Accepted: Sep. 17, 2018
Published Online: Apr. 2, 2019
The Author Email: Jun Wang (wjun@uestc.edu.cn)