Laser & Optoelectronics Progress, Volume. 60, Issue 21, 2100001(2023)
Research Progress on Preparation of Three-Dimensional Micro-Nano Connected Structures in Transparent Materials by Femtosecond Laser Material Reduction Method
With the continuous development of medicine, optics, chemistry, communication and other fields, various micro total analysis system, lab-on-a-chip, micro electro mechanical systems and high-precision micro-nano devices began to appear and are gradually used. Most of these systems or structures are realized by preparing three-dimensional micro-nano connected structures in transparent materials by femtosecond laser. Therefore, the main technologies of femtosecond laser preparation of three-dimensional micro-nano structures are introduced, the main applications of micro-nano connectedstructures are summarized, the existing problems of current femtosecond laser preparation of three-dimensional micro-nano connected structures are put forward, and the technology is prospected.
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Chaoyue Yan, Shengzhi Sun, Xiaofeng Liu, Jianrong Qiu. Research Progress on Preparation of Three-Dimensional Micro-Nano Connected Structures in Transparent Materials by Femtosecond Laser Material Reduction Method[J]. Laser & Optoelectronics Progress, 2023, 60(21): 2100001
Category: Reviews
Received: Nov. 22, 2022
Accepted: Dec. 19, 2022
Published Online: Oct. 26, 2023
The Author Email: Sun Shengzhi (sunshengzhi@nbu.edu.cn)