Acta Optica Sinica, Volume. 8, Issue 3, 261(1988)

Vapor-phase mixed deposition of optical coatings

DUAN ZHIPING1 and ZHOU JIULIN2
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  • 1[in Chinese]
  • 2[in Chinese]
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    Two thin-film materials are evaporated simultaneously from reepective sources in vacuum where vapor-phase mixed thin films will be formed. Experimental methods are described for the vapor-phase mixed deposition, and three programs for controlling deposition are presented. The experimental results of two broad-band antireflection coatings are given as practical examples. Experiments show that vapor-phase mixed deposition is a promising technique for application.

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    DUAN ZHIPING, ZHOU JIULIN. Vapor-phase mixed deposition of optical coatings[J]. Acta Optica Sinica, 1988, 8(3): 261

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    Paper Information

    Category: Thin Films

    Received: Jun. 5, 1987

    Accepted: --

    Published Online: Sep. 16, 2011

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