Acta Optica Sinica, Volume. 8, Issue 3, 261(1988)
Vapor-phase mixed deposition of optical coatings
Two thin-film materials are evaporated simultaneously from reepective sources in vacuum where vapor-phase mixed thin films will be formed. Experimental methods are described for the vapor-phase mixed deposition, and three programs for controlling deposition are presented. The experimental results of two broad-band antireflection coatings are given as practical examples. Experiments show that vapor-phase mixed deposition is a promising technique for application.
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DUAN ZHIPING, ZHOU JIULIN. Vapor-phase mixed deposition of optical coatings[J]. Acta Optica Sinica, 1988, 8(3): 261