Acta Optica Sinica, Volume. 31, Issue 5, 512004(2011)

Fourier Analysis of Phase-Masked Spatial Carrier Interferogram

Xu Jiancheng1、*, Du Yawei2, Xu Qiao2, Peng Baojin1, and Wu Genzhu1
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  • 1[in Chinese]
  • 2[in Chinese]
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    The process accuracy of phase-masked spatial carrier interferogram is related to the performance of the dynamic interferometer. According to the property of the phase mask, a method based on Fourier transform is proposed to extract the phase from the phase-masked spatial carrier interferogram. The method translates the full-resolution interferogram into a linear spatial carrier interferogram by pixel rearrangement, and then extracts the final full-resolution phase distribution by Fourier transform and pixel rearrangement again. Experimental results show that the peak-valley value and the root mean square of four-step phase shifting algorithm are 0.7467λ and 0.0348λ respectively, while those of the proposed method are 0.2989λ and 0.0088λ. Thus the proposed method is more accurate than four-step phase shifting algorithm for analyzing phase-masked spatial carrier interferogram.

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    Xu Jiancheng, Du Yawei, Xu Qiao, Peng Baojin, Wu Genzhu. Fourier Analysis of Phase-Masked Spatial Carrier Interferogram[J]. Acta Optica Sinica, 2011, 31(5): 512004

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    Paper Information

    Category: Instrumentation, Measurement and Metrology

    Received: Sep. 20, 2010

    Accepted: --

    Published Online: May. 9, 2011

    The Author Email: Jiancheng Xu (xujiancheng@zjnu.cn)

    DOI:10.3788/aos201131.0512004

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