Acta Optica Sinica, Volume. 31, Issue 5, 512004(2011)
Fourier Analysis of Phase-Masked Spatial Carrier Interferogram
The process accuracy of phase-masked spatial carrier interferogram is related to the performance of the dynamic interferometer. According to the property of the phase mask, a method based on Fourier transform is proposed to extract the phase from the phase-masked spatial carrier interferogram. The method translates the full-resolution interferogram into a linear spatial carrier interferogram by pixel rearrangement, and then extracts the final full-resolution phase distribution by Fourier transform and pixel rearrangement again. Experimental results show that the peak-valley value and the root mean square of four-step phase shifting algorithm are 0.7467λ and 0.0348λ respectively, while those of the proposed method are 0.2989λ and 0.0088λ. Thus the proposed method is more accurate than four-step phase shifting algorithm for analyzing phase-masked spatial carrier interferogram.
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Xu Jiancheng, Du Yawei, Xu Qiao, Peng Baojin, Wu Genzhu. Fourier Analysis of Phase-Masked Spatial Carrier Interferogram[J]. Acta Optica Sinica, 2011, 31(5): 512004
Category: Instrumentation, Measurement and Metrology
Received: Sep. 20, 2010
Accepted: --
Published Online: May. 9, 2011
The Author Email: Jiancheng Xu (xujiancheng@zjnu.cn)