Based on the theoretical basis of the interaction between particles and matter， the influence of charged particle energy， incident angle， detector thickness， and sensitive area on position sensitive silicon detector （PSSD） position resolution is analyzed by using FLUKA Monte Carlo simulation software. The simulation results show that as the electron energy increases， the position resolution capability of the detector becomes worse. When the electron energy increases to pass through the detector， the position resolution capability gradually increases with the increase of energy. For the detectors of different thickness， when the electron energy is completely deposited in the detector， the position resolution ability of the detector is basically the same. When the electron energy is not completely deposited in the detector， the position resolution ability of the detector with a larger thickness is relatively poor. The limited area of the detector will affect the position resolution. When electrons enter the detector at an incident angle α≤45°， the detected electron position will shift. The larger the incident angle， the more obvious the shift.