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Optics and Precision Engineering, Volume. 14, Issue 2, 173(2006)

Structural error correction and simulation of capacitive displacement sensor for segmented mirrors

[in Chinese] and [in Chinese]
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    [in Chinese], [in Chinese]. Structural error correction and simulation of capacitive displacement sensor for segmented mirrors[J]. Optics and Precision Engineering, 2006, 14(2): 173

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    Received: Apr. 22, 2005

    Accepted: --

    Published Online: Feb. 18, 2008

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    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology