Acta Optica Sinica, Volume. 35, Issue s1, 105001(2015)
Substrate Positioning Error Analysis and Compensation Method in Holographic Grating Fabrication
Substrate positioning error in exposure system will directly harm the groove accuracy of holographic grating. It will cause grating period error in the plane holographic grating, or increase the aberration of the concave holographic grating. The effects on grating period with the positioning error of the standard grating as well as the substrate are analyzed, while moiré fringe method is used to adjust the interference field period in the Lloyd′s mirror interference system of holographic grating. The positioning error which can be compensated by adjusting the substrate parallel to the standard grating surface is pointed out.
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Dong Ningning, Cui Jinjiang, Xu Jiangen, Xu Jie. Substrate Positioning Error Analysis and Compensation Method in Holographic Grating Fabrication[J]. Acta Optica Sinica, 2015, 35(s1): 105001
Category: Diffraction and Gratings
Received: Jan. 13, 2015
Accepted: --
Published Online: Jul. 27, 2015
The Author Email: Ningning Dong (dongnn@sibet.ac.cn)