Acta Optica Sinica, Volume. 7, Issue 6, 481(1987)
Lifetime study of a transverse flow excimer laser
The effects of gas mixture ratio, gas passivation, optical window deposition and laser gas storage time on the lifetime of a transverse flow XeCl excimer laser were studied in detail. By optimizing these parameters, a lifetime of more than 105 pulses was obtained with a storage time of 1000 hours for one gas fill.
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LOU QIHONG, HUO YUNSHENG, DONG JINXING, DING ZIAN, WEI YUNKONG, DING AIZHEN. Lifetime study of a transverse flow excimer laser[J]. Acta Optica Sinica, 1987, 7(6): 481