Chinese Journal of Lasers, Volume. 8, Issue 2, 17(1981)
A UV-preionized ArF and KrF excimer laser
UV-preionzed ArF and KrF excimer lasers are reported. Maximum pulse energies of 105 mJ in ArF and 185 mJ in KrF were extracted. In this paper we discuss the effect of various parameters on laser performances.
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Shang Guancheng, Yuan Cailai, Ye Chao, Dou Airong. A UV-preionized ArF and KrF excimer laser[J]. Chinese Journal of Lasers, 1981, 8(2): 17
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