Acta Optica Sinica, Volume. 35, Issue s1, 122001(2015)
Method to Fabricate Spiral Phase Plate with Continous Surface by One Exposure Processing
A method for fabricating spiral phase plate (SPP) with continuous surface is proposed. An interval is used to quantize the three dimension surface of SPP into two dimension bars to form a binary mask. The exposure dose can be precisely modulated through this mask in the exposure process. The select criterion of the quantization interval is discussed in detail. As the results, four kinds of high-quality SPPs with topological charges 1,3,10 and 20 are fabricated which can be used under the wavelength of 532 nm. The corresponding optical effects are also measured.
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Shi Lifang, Cao Axiu, Guo Shuji, Luo Xue, Qin Yanyun, Deng Qiling. Method to Fabricate Spiral Phase Plate with Continous Surface by One Exposure Processing[J]. Acta Optica Sinica, 2015, 35(s1): 122001
Category: Optical Design and Fabrication
Received: Feb. 15, 2015
Accepted: --
Published Online: Jul. 27, 2015
The Author Email: Lifang Shi (shilifang@ioe.ac.cn)