Acta Optica Sinica, Volume. 14, Issue 11, 1230(1994)
Fabrication of X Type Crossing Waveguide Structure Constructed by Large Single-Mode Rib SOI Waveguide
X type crossing waveguide structures constructed by large single-mode rib SOI (Silicon-on-insulator) waveguide have been fabricated. The SOI structure is formed by SDB (silicon wafer direct bonding) process. When crossing angle of the crossing waveguides is equal to 2°, their crosstakles is below to -20 dB, their radiation losses is below to 0.3 dB, and their propegstion losses of the direct channels are measured to beapptoximately 0.85 dB/cm at a wavelength of 1.3 μm.
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[in Chinese], [in Chinese], [in Chinese]. Fabrication of X Type Crossing Waveguide Structure Constructed by Large Single-Mode Rib SOI Waveguide[J]. Acta Optica Sinica, 1994, 14(11): 1230