Spectroscopy and Spectral Analysis, Volume. 31, Issue 10, 2651(2011)

Study of Plasma Temperature Measurements for Oxygen Discharge

LI Liu-cheng*, WANG Zeng-qiang, LI Guo-fu, and DUO Li-ping
Author Affiliations
  • [in Chinese]
  • show less

    A radio-frequency discharge setup was constructed by two shell-shaped copper electrodes and a 30 cm long pyrex glass tube (i.d.=1.65 cm) to examine the gas temperature of oxygen plasma in electric discharge oxygen iodine laser. The discharge was supplied by a 500 watt, 13.56 MHz radio-frequency power. The gas pressure in the discharge cavity was 1 330 Pa. The temperature of oxygen discharge plasma was measured by using the P branch of O2(b, ν=0) rotational emission spectrum. Two methods were used to deduce the oxygen gas temperature. They are Boltzman plotting method and computer simulating spectrum method, respectively. Gauss fitting method was used to distinguish spectrum peaks for lower resolution spectrum. The spectrum peak area was used to characterize the optical emission intensity. The gas temperature of oxygen discharge plasma was obtained by Boltzmann plotting method. Alternatively, the optical emission spectrum was simulated by computer modeling with spectrometer slit function which was obtained by He-Ne laser. Consequently, the gas temperature of oxygen plasma was obtained by comparing the computer simulating spectrum and the experimentally observed spectrum according to the least square fitting rule. The measurement results with the two methods agree well. It was concluded that the simple optical technique can be used conveniently in the temperature diagnostics of oxygen radio-frequency discharge plasma.

    Tools

    Get Citation

    Copy Citation Text

    LI Liu-cheng, WANG Zeng-qiang, LI Guo-fu, DUO Li-ping. Study of Plasma Temperature Measurements for Oxygen Discharge[J]. Spectroscopy and Spectral Analysis, 2011, 31(10): 2651

    Download Citation

    EndNote(RIS)BibTexPlain Text
    Save article for my favorites
    Paper Information

    Received: Dec. 15, 2010

    Accepted: --

    Published Online: Nov. 9, 2011

    The Author Email: Liu-cheng LI (liliucheng@dicp.ac.cn)

    DOI:10.3964/j.issn.1000-0593(2011)10-2651-04

    Topics