Laser & Optoelectronics Progress, Volume. 51, Issue 11, 110902(2014)

Fabrication of High Precision Computer Generated Hologram for Aspheric Surface Testing by Laser-Direct Writing

Zhao Longbo1,2、*, Zhang Zhiyu1, Zhu Deyan1,2, Wang Yanchao1,2, Zheng Ligong1, and Zhang Xuejun1
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  • 1[in Chinese]
  • 2[in Chinese]
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    In order to realize high-precision testing of aspherical surface, the key technology for fabricating computer generated hologram (CGH) by laser-direct writing (DWL) is studied in this paper. To obtain the minimum line-width deviation, the influences of defocus and the wet-etching processes on the line-width are firstly investigated. The position errors under different line-widths are obtained by analyzing the relationship of line-width error and the position error. According to the above-obtained results, a CGH with diameter of 80 mm and the minimum line-width of 1.8 mm is successfully fabricated. Testing results show that the wavefront error is only 0.011l, achieving the l/100 level. The fabricated CGH is expected to be used in the high-precision testing of asphercal surfaces.

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    Zhao Longbo, Zhang Zhiyu, Zhu Deyan, Wang Yanchao, Zheng Ligong, Zhang Xuejun. Fabrication of High Precision Computer Generated Hologram for Aspheric Surface Testing by Laser-Direct Writing[J]. Laser & Optoelectronics Progress, 2014, 51(11): 110902

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    Paper Information

    Category: Holography

    Received: May. 20, 2014

    Accepted: --

    Published Online: Nov. 7, 2014

    The Author Email: Longbo Zhao (zhaolb.cc@foxmail.com)

    DOI:10.3788/lop51.110902

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