Laser & Optoelectronics Progress, Volume. 51, Issue 11, 110902(2014)
Fabrication of High Precision Computer Generated Hologram for Aspheric Surface Testing by Laser-Direct Writing
In order to realize high-precision testing of aspherical surface, the key technology for fabricating computer generated hologram (CGH) by laser-direct writing (DWL) is studied in this paper. To obtain the minimum line-width deviation, the influences of defocus and the wet-etching processes on the line-width are firstly investigated. The position errors under different line-widths are obtained by analyzing the relationship of line-width error and the position error. According to the above-obtained results, a CGH with diameter of 80 mm and the minimum line-width of 1.8 mm is successfully fabricated. Testing results show that the wavefront error is only 0.011l, achieving the l/100 level. The fabricated CGH is expected to be used in the high-precision testing of asphercal surfaces.
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Zhao Longbo, Zhang Zhiyu, Zhu Deyan, Wang Yanchao, Zheng Ligong, Zhang Xuejun. Fabrication of High Precision Computer Generated Hologram for Aspheric Surface Testing by Laser-Direct Writing[J]. Laser & Optoelectronics Progress, 2014, 51(11): 110902
Category: Holography
Received: May. 20, 2014
Accepted: --
Published Online: Nov. 7, 2014
The Author Email: Longbo Zhao (zhaolb.cc@foxmail.com)