Laser & Optoelectronics Progress, Volume. 51, Issue 10, 101403(2014)
Research on 3-Ray Automatic Alignment in High Power Excimer Laser MOPA System
Automatic alignment of laser beam is an important part of the large laser device. Taking classical imagerelaying unit in an excimer (XeCl) laser master oscillator power-amplifier (MOPA) system as an example, the establishment of alignment benchmark, the automatic alignment principle of 3-ray and charge-coupled device (CCD) image acquisition and processing method are introduced. It has been proved by the experiment results that this alignment unit can appease the request of laser automatic alignment of MOPA system.
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Qian Hang, Wang Dahui, Ma Lianying, Zhang Yongsheng, Zhao Xueqing, Zhu Yongxiang, Yi Aiping. Research on 3-Ray Automatic Alignment in High Power Excimer Laser MOPA System[J]. Laser & Optoelectronics Progress, 2014, 51(10): 101403
Category: Lasers and Laser Optics
Received: Mar. 28, 2014
Accepted: --
Published Online: Sep. 10, 2014
The Author Email: Hang Qian (bingtongst@163.com)