The ultraviolet (UV) laser interaction with semiconductors has a considerable interest in recent years. The applications of UV laser interaction with semiconductors are reviewed, including photon-electron industry, laser machining and laser surface modification. The theory of UV laser interaction with semiconductors is introduced, and the theory model of UV laser ablation on the semiconductor is summarized, including heat conduction model, carrier coupling diffusion model, photochemical model, thermal surface vaporization model, double-temperature model and laser induced surface charging model. The experimental results of damage morphology, ablation threshold and mechanisms of semiconductor damaged by UV laser ablation are summarized. The proposals of possible research and new application field of UV laser interaction with semiconductors are presented.