Acta Optica Sinica, Volume. 20, Issue 3, 384(2000)

Fiber Confocal Scanning Microscopy for the Measurement of Optical Disk Pregrooves

[in Chinese], [in Chinese], [in Chinese], and [in Chinese]
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  • [in Chinese]
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    A new surface measurement method for an object with different reflection is demonstrated based on differential confocal microscopy. The limit ranges of edge positioning is proposed while using edge criteria in fiber confocal scanning microscopy. As application, the optical disk pre-groove is measured by using fiber optical confocal scanning imaging system. The gray image and cross-section profile with groove width, depth and pitch are given. The experimental results are in good agreement with the reference data.

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    [in Chinese], [in Chinese], [in Chinese], [in Chinese]. Fiber Confocal Scanning Microscopy for the Measurement of Optical Disk Pregrooves[J]. Acta Optica Sinica, 2000, 20(3): 384

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    Paper Information

    Category: Instrumentation, Measurement and Metrology

    Received: Jan. 14, 1999

    Accepted: --

    Published Online: Aug. 9, 2006

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