Optics and Precision Engineering, Volume. 19, Issue 1, 41(2011)

Application of multi-mode combined polishing to optical manufacturing

XUAN Bin1,2、*, XIE Jing-jiang1, and SONG Shu-mei
Author Affiliations
  • 1[in Chinese]
  • 2[in Chinese]
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    The multi-mode combined polishing technology based on traditional polishing and numerical control polishing methods was introduced. The simulation of material removal rate, one of the key processes of the multi-mode combined polishing,was described in detail. By setting the factors of laps and workpieces,the model for material removal rates involves not only polishing modes and polishing velocity but also the influences of the lap shape, edge effect and surface error on material removal rates. Furthermore,it can choose the different simulation precisions depending on the manufacture process. The practical results show that the multi-mode combined polishing technique provides high polishing efficiency and suppresses and reduces the ripple efficiently. The precision of surface error of optical spheres and flats can reach 20 nm (rms) and those of the aspheres can be 30 nm to 40 nm (rms) so far.Obtained results indicate that the multi-mode combine polishing is a proper technology for the manufacture of large components.

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    XUAN Bin, XIE Jing-jiang, SONG Shu-mei. Application of multi-mode combined polishing to optical manufacturing[J]. Optics and Precision Engineering, 2011, 19(1): 41

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    Paper Information

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    Received: Mar. 30, 2010

    Accepted: --

    Published Online: Mar. 28, 2011

    The Author Email: Bin XUAN (xbjsnt@sina.com)

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