Acta Optica Sinica, Volume. 42, Issue 7, 0734001(2022)

Finite Element Analysis of Compensation of Surface Shape Accuracy of Piezoelectric Bimorph Mirror

Tong Li1,2, Nan Wang1,3, Wanqian Zhu1,3, Zhongmin Xu1,3, Limin Jin1,3, Xiaohao Dong1,3, and Song Xue1,3、*
Author Affiliations
  • 1Shanghai Institute of Applied Physics, Chinese Academy of Sciences, Shanghai 201800, China
  • 2University of Chinese Academy of Sciences, Shanghai 100049, China
  • 3Shanghai Advanced Research Institute, Chinese Academy of Sciences, Shanghai 201210, China
  • show less

    According to the preliminary requirements of hard X-ray free electron laser (HXFEL) for offset mirror group (the meridian shape error is less than 0.5 μrad before bending and after clamping), the traditional mechanical bending is difficult to meet and can be corrected in real time, so the structure of piezoelectric side-placed piezoelectric bimorph mirror (PBM) is adopted. The mirror is placed horizontally, and the voltage needed to correct the low frequency surface shape error caused by dead weight is calculated by singular value decomposition (SVD) method, and the feasibility of the scheme is verified by finite element analysis method. Different bending surface shapes are solved and analyzed, and then thermal analysis method is added to solve the surface shape mutation caused by local radiation. The simulation results show that in the case of dead weight, the initial slope error of the mirror is 242.43 nrad (root mean square, RMS), and the slope error can be greatly reduced to 7.743 nrad (RMS) after voltage bending correction. When adjusting the target shape, the slope error between the actual bending shape and the target shape is only 0.0024 nrad (RMS).

    Tools

    Get Citation

    Copy Citation Text

    Tong Li, Nan Wang, Wanqian Zhu, Zhongmin Xu, Limin Jin, Xiaohao Dong, Song Xue. Finite Element Analysis of Compensation of Surface Shape Accuracy of Piezoelectric Bimorph Mirror[J]. Acta Optica Sinica, 2022, 42(7): 0734001

    Download Citation

    EndNote(RIS)BibTexPlain Text
    Save article for my favorites
    Paper Information

    Category: X-Ray Optics

    Received: Aug. 11, 2021

    Accepted: Oct. 15, 2021

    Published Online: Mar. 28, 2022

    The Author Email: Xue Song (xuesong@zjlab.org.cn)

    DOI:10.3788/AOS202242.0734001

    Topics