Acta Optica Sinica, Volume. 42, Issue 7, 0734001(2022)
Finite Element Analysis of Compensation of Surface Shape Accuracy of Piezoelectric Bimorph Mirror
According to the preliminary requirements of hard X-ray free electron laser (HXFEL) for offset mirror group (the meridian shape error is less than 0.5 μrad before bending and after clamping), the traditional mechanical bending is difficult to meet and can be corrected in real time, so the structure of piezoelectric side-placed piezoelectric bimorph mirror (PBM) is adopted. The mirror is placed horizontally, and the voltage needed to correct the low frequency surface shape error caused by dead weight is calculated by singular value decomposition (SVD) method, and the feasibility of the scheme is verified by finite element analysis method. Different bending surface shapes are solved and analyzed, and then thermal analysis method is added to solve the surface shape mutation caused by local radiation. The simulation results show that in the case of dead weight, the initial slope error of the mirror is 242.43 nrad (root mean square, RMS), and the slope error can be greatly reduced to 7.743 nrad (RMS) after voltage bending correction. When adjusting the target shape, the slope error between the actual bending shape and the target shape is only 0.0024 nrad (RMS).
Get Citation
Copy Citation Text
Tong Li, Nan Wang, Wanqian Zhu, Zhongmin Xu, Limin Jin, Xiaohao Dong, Song Xue. Finite Element Analysis of Compensation of Surface Shape Accuracy of Piezoelectric Bimorph Mirror[J]. Acta Optica Sinica, 2022, 42(7): 0734001
Category: X-Ray Optics
Received: Aug. 11, 2021
Accepted: Oct. 15, 2021
Published Online: Mar. 28, 2022
The Author Email: Xue Song (xuesong@zjlab.org.cn)