Infrared and Laser Engineering, Volume. 46, Issue 7, 717001(2017)
Method of no stitching interferometric measurement for rotatory cylindrical surface
A new method and a Fizeau type interference system were introduced in this paper, cylindrical coordinates and cartesian coordinates can be mutual transformation, through a high precision 90°conical reflector. This system was suitable for the test of 360°rotatory cylindrical surface, and the whole surface information can be achieved with one measurement without stitching. The error correction matrix was established in cylindrical coordinates, after analyzing the main component system errors, and simulating their effect with Matlab. A metal ring was tested to prove the feasibility and validity of this method and system. The principal error correction result was consistent with the measurement result by Taylor Hobson, and it was very close to the roundness value, which was calculated through the least square circle (LSC) assessment method. The experimental results show that: this method and system can realized the 360°cylindrical surface measurement, and the problems of rotary elements testing, low efficiency will be solved.
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Sun Hao, Han Sen, Tang Shouhong, Wang Fang. Method of no stitching interferometric measurement for rotatory cylindrical surface[J]. Infrared and Laser Engineering, 2017, 46(7): 717001
Category: 光电测量
Received: Nov. 10, 2016
Accepted: Dec. 20, 2016
Published Online: Sep. 21, 2017
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