Infrared and Laser Engineering, Volume. 30, Issue 3, 222(2001)
Fabrication of uncooled infrared focal plane array BST ferroelectric thin films and properties
BST ferroelectric thin films with perovskite structure on Pt/Ti/SiO-2/Si substrate have been fabricated by improved sol-gel processing. The dielectric constant ε-r and dielectric loss tgδ of BST5, BST10, BST15 were 375, 400, 425 and 0.041, 0.024, 0.010, respectively. Their remanent polarization P r and coercive field E c were 2μc/cm+2, 2.5μc/cm+2, 1.7μc/cm+2 and 40kV/cm, 50kV/cm, 35kV/cm, respectively. BST ferroelectric thin film is a kind of excellent material for uncooled infrared focal plane array.
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[in Chinese], [in Chinese], [in Chinese], [in Chinese]. Fabrication of uncooled infrared focal plane array BST ferroelectric thin films and properties[J]. Infrared and Laser Engineering, 2001, 30(3): 222
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