Piezoelectrics & Acoustooptics, Volume. 42, Issue 5, 640(2020)
Finite Element Analysis and Experiment of Multi-directional Composite Ultrasonic Transducer
The ultrasonic transducer is the core actuator of microelectronic packaging technology. In order to solve the problems of low bonding efficiency, uneven bonding surface and insecure bonding point of traditional one-dimensional longitudinal vibration ultrasonic transducer, the finite element model of transducer is established by ANSYS simulation software for modal analysis and harmonic response analysis. A kind of 40 kHz multi-directional composite sandwich piezoelectric ultrasonic transducer that can realize axial longitudinal vibration, horizontal bending vibration and vertical pitching vibration at the same time is designed. Among them, the piezoelectric part consists of a whole ring and a 1/4 ring ceramic sheet which can be excited separately. The impedance frequency characteristic curves of longitudinal vibration, bending vibration and pitching vibration of the transducer are obtained by the physical test of the impedance analyzer. The results show that the test values are basically consistent with that of the simulation analysis, and the structural performance parameters meet the bonding requirements, which verify the rationality of the structure.
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GAO Changbin, XUE Jinxue, MA Wenju, LONG Zhili, ZHAO Heng. Finite Element Analysis and Experiment of Multi-directional Composite Ultrasonic Transducer[J]. Piezoelectrics & Acoustooptics, 2020, 42(5): 640
Received: Apr. 20, 2020
Accepted: --
Published Online: Apr. 21, 2022
The Author Email: GAO Changbin (394867442@qq.com)