Semiconductor Optoelectronics, Volume. 43, Issue 2, 261(2022)
Research Progresses of Si-based Ge PIN Photodetectors
Since the breakthrough of epitaxy technology of Si-based Ge film, Si-based Ge optoelectronic devices have developed rapidly, among which Si-based Ge photodetectors are the most prominent. Because Ge can absorb the light in the near-infrared communication band and is fully compatible with the Si CMOS process, Si-based Ge detectors are almost the only choice for Si-based optical detection. This paper mainly introduces the research progresses of two common Si-based Ge photodetectors (normal incidence and waveguide coupling), including typical device structures, and the main methodes to improve the performance of responsivity and bandwidth.
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LIU Zhi, CHENG Buwen. Research Progresses of Si-based Ge PIN Photodetectors[J]. Semiconductor Optoelectronics, 2022, 43(2): 261
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Received: Apr. 10, 2022
Accepted: --
Published Online: Jul. 21, 2022
The Author Email: Buwen CHENG (cbw@semi.ac.cn)