Opto-Electronic Engineering, Volume. 47, Issue 8, 190435(2020)

Shape measurement of stressed mirror based on stereoscopic phase measuring deflectometry

Chen Zhenyi1...2,*, Zhao Wenchuan2, Zhang Qican1, Han Yu2 and Liu Yuankun1 |Show fewer author(s)
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  • 1[in Chinese]
  • 2[in Chinese]
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    Stressed polishing technology transforms aspheric fabrication into spherical fabrication by applying pre-determined loads on the surface of the mirror. The key to achieve high precision of stressed polishing is to test the surface deformation with high precision. Stereoscopic phase measuring deflectometry was used to test the surface topography and the deformation of stressed mirror. After obtained unwrapped phase distribution, and combined with normal consistency constraint and gradient integral algorithm, the height distribution was finally obtained. Composi-tion of systematic errors were simulated. Also, the errors were calibrated and removed by N-step averaging method in this system, which improved the measuring precision. In this paper, the surface topography and the deformation of a stressed mirror with a diameter of 320 mm, spherical radius of 5200 mm were measured. The measuring results were consistent with the corresponding result of CMM and finite element simulation, indicating that this proposed method is on the level of micron in terms of accuracy and more suitable for the test of stressed mirror compared with interferometer and CMM.

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    Chen Zhenyi, Zhao Wenchuan, Zhang Qican, Han Yu, Liu Yuankun. Shape measurement of stressed mirror based on stereoscopic phase measuring deflectometry[J]. Opto-Electronic Engineering, 2020, 47(8): 190435

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    Paper Information

    Category: Article

    Received: Jul. 23, 2019

    Accepted: --

    Published Online: Oct. 28, 2020

    The Author Email: Chen Zhenyi (13628045693@163.com)

    DOI:10.12086/oee.2020.190435

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