Laser & Optoelectronics Progress, Volume. 60, Issue 19, 1926001(2023)

Modeling and Analysis of Parasitic Capacitance in 4-Transistor Pixels Based on Self-Alignment Technique

Yajuan Du1,2, Jing Gao1,2、*, Zhiyuan Gao1,2, and Kaiming Nie1,2
Author Affiliations
  • 1School of Microelectronics, Tianjin University, Tianjin 300072, China
  • 2Tianjin Key Laboratory of Imaging and Sensing Microelectronic Technology, Tianjin 300072, China
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    Conversion gain is an important parameter of low-light CMOS image sensors, and realizing improvements in conversion gain helps to enhance their signal-to-noise ratio, which in turn improves their sensitivity and imaging quality. Because the conversion gain is inversely related to the parasitic capacitance of a pixel, this paper proposes a two-dimensional physical model of the parasitic capacitance of a 4-transistor active pixel based on the self-alignment technique to effectively improve the conversion gain. The proposed model establishes the relationship between pixel parasitic capacitance and injection conditions, which include injection dose, injection energy, and reset voltage. The calculated results of the model are in good agreement with the TCAD simulation results, and the variance between them is less than 0.0028 fF2, verifying its accuracy. The proposed model can be applied to the design and optimization of high-performance image sensors, especially high-sensitivity low-light image sensors.

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    Yajuan Du, Jing Gao, Zhiyuan Gao, Kaiming Nie. Modeling and Analysis of Parasitic Capacitance in 4-Transistor Pixels Based on Self-Alignment Technique[J]. Laser & Optoelectronics Progress, 2023, 60(19): 1926001

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    Paper Information

    Category: Physical Optics

    Received: Apr. 11, 2022

    Accepted: Jun. 13, 2022

    Published Online: Sep. 28, 2023

    The Author Email: Gao Jing (gaojing@tju.edu.cn)

    DOI:10.3788/LOP221253

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