Chinese Journal of Quantum Electronics, Volume. 18, Issue 6, 521(2001)

Excimer Laser With Directional Prism Cavity

[in Chinese]1... [in Chinese]1, [in Chinese]1, [in Chinese]1, [in Chinese]2 and [in Chinese]3 |Show fewer author(s)
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    In common XeCl excimer laser, using directional prism to replace entire reflection mirror, excimer laser with directional prism cavity was obtained. The laser is high stability of anti-disalignment. Beam distribution is coherent flattened in the near field and focusability in the far field. Directional prism cavity compresses the beam divergence angle, and improves the beam quality This paper provides a novel utility excimer laser technology.

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    [in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese]. Excimer Laser With Directional Prism Cavity[J]. Chinese Journal of Quantum Electronics, 2001, 18(6): 521

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    Paper Information

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    Received: Nov. 17, 2000

    Accepted: --

    Published Online: May. 15, 2006

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