Chinese Optics Letters, Volume. 8, Issue s1, 186(2010)
In situ optical monitor system for CIGS solar cell applications
An in situ process monitor for the CuInxGa1?xSe2 (copper indium gallium selenide) (CIGS) coating system is a very important tool that produces repeatable, high-quality CIGS coatings. This letter provides an overview of the current state of application of in situ process monitor systems for co-evaporation CIGS coatings. A comparison between different in situ monitoring systems is given and a novel multiple-elements rate monitor system is introduced.
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Bin Fan, Takehiko Nagai. In situ optical monitor system for CIGS solar cell applications[J]. Chinese Optics Letters, 2010, 8(s1): 186
Paper Information
Received: Oct. 11, 2009
Accepted: --
Published Online: May. 14, 2010
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