The radially polarized femtosecond pulse laser is investigated and introduced into the micro/nano processing system which is based on two-photon absorption theory. The two-dimension micro/nano polymer structure with higher longitudinal resolution and lower aspect ratio is obtained. Theoretical simulation of intensity distribution within focal light field indicates that the radially polarized femtosecond pulse laser can reduce the lateral resolution of polymer structure to a certain extent while improving the longitudinal resolution, which reduces the aspect ratio of the polymer structure. The results obtained by characterizing the polymer structure with the scanning electron microscopy are in good agreement with the theoretical simulation results. The radially polarized femtosecond laser can improve the longitudinal resolution of micro/nano scale polymer structure. It has good application prospects in the field of laser lithography.