Acta Optica Sinica, Volume. 7, Issue 2, 159(1987)
General consideration of optical system in the projection aligner
The specific parameters of main optical system are deduced from the requirement of pattern transfer for the projection aligner. The limit of these parameters is discussed.
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WANG ZHIJIANG, ZOU HAIXING. General consideration of optical system in the projection aligner[J]. Acta Optica Sinica, 1987, 7(2): 159
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