Acta Optica Sinica, Volume. 31, Issue 10, 1004002(2011)
Metal-Semiconductor-Metal Structured Mg0.2Zn0.8O Visible Blind Photodetectors
The metal-semiconductor-metal (MSM) structured Mg0.2Zn0.8O photodetectors with different electrode spacings are made by radio frequency magnetron sputtering, conventional ultraviolet exposure and wet etching methods. The relationship between electrode spacing and dark current or responsivity is studied. Before achieving the punch-through voltage, the dark current and responsivity both decrease with the electrode spacing increasing. Furthermore, the specific mechanisms are also investigated.
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Jiang Dayong, Xu Feng, Cao Xue, Sun Yungang, Chen Meng, Liu Xinyu. Metal-Semiconductor-Metal Structured Mg0.2Zn0.8O Visible Blind Photodetectors[J]. Acta Optica Sinica, 2011, 31(10): 1004002
Category: Detectors
Received: Jun. 15, 2011
Accepted: --
Published Online: Sep. 29, 2011
The Author Email: Dayong Jiang (dayongjiang1981@126.com)