Chinese Journal of Lasers, Volume. 41, Issue 3, 310002(2014)

A Method of Fabricating Concave Polydimethylsiloxane Microlens Array

Zhong Kejun1,2、*, Gao Yiqing1,2, Li Feng2, and Zhang Zhimin2
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  • 1[in Chinese]
  • 2[in Chinese]
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    We present a method for fabrication of concave polydimethylsiloxane (PDMS ) microlens array. A digital maskless grayscale lithography system based on digital micromirror device (DMD) is established. Microlens array with a square base is fabricated in photoresist by the system, which is used as replication model. By replica molding technique, a concave PDMS microlens array with a square base is fabricated. Experimental and test results show that the edges of PDMS microlenses are clear, the surfaces are smooth, and the spotlight performances are favorable. The light intensities which transit the microlens array are uniform. The approach described in the paper is a new method for fabrication of concave PDMS microlens, which has advantages of facile, effective, low cost, and arrays can be replicated by larger scale.

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    Zhong Kejun, Gao Yiqing, Li Feng, Zhang Zhimin. A Method of Fabricating Concave Polydimethylsiloxane Microlens Array[J]. Chinese Journal of Lasers, 2014, 41(3): 310002

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    Paper Information

    Category: micro and nano optics

    Received: Aug. 22, 2013

    Accepted: --

    Published Online: Feb. 26, 2014

    The Author Email: Kejun Zhong (kjzhong@126.com)

    DOI:10.3788/cjl201441.0310002

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