Infrared and Laser Engineering, Volume. 48, Issue 11, 1113003(2019)
Study on classification and detection of supersmooth surface defects
In order to distinguish the scattered light generated by the three defects of micro-particles, sub-surface and micro-roughness existing above the super smooth surface, and to obtain the best region for detecting these three scattering mechanisms, combined the Bidirectional Reflectance Distribution Function (BRDF) with Jones matrix and the polarization coefficients of the three defects were given in the four polarization states ss, sp, ps, pp. On this basis, the relationship between the three defects and scattering azimuth in four polarization states was simulated and analyzed. The results show that these defects could be distinguished by using p-polarized scattering light induced by p-polarized incident light. According to the different relations between the three defects and the variation of scattering azimuth, the best area to distinguish three kinds of defects and its realization methods were given.
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Xie Gesa, Wang Hongjun, Wang Dasen, Tian Ailing, Liu Bingcai, Zhu Xueliang, Liu Weiguo. Study on classification and detection of supersmooth surface defects[J]. Infrared and Laser Engineering, 2019, 48(11): 1113003
Category: 光电测量
Received: Jul. 5, 2019
Accepted: Aug. 15, 2019
Published Online: Dec. 9, 2019
The Author Email: Gesa Xie (1103287447@qq.com)