Infrared and Laser Engineering, Volume. 51, Issue 9, 20220611(2022)

Combined fabrication of high order off-axis convex aspheric mirror (invited)

Lirong Peng1,2, Qiang Cheng2、*, Xuefeng Zeng2, and Xiaoqin Zhou1
Author Affiliations
  • 1School of Mechanical and Aerospace Engineering, Jilin University, Changchun 130025, China
  • 2Key Laboratory of Optical System Advanced Manufacturing Technology, Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences, Changchun 130033, China
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    In order to improve the manufacturing accuracy and efficiency of the secondary mirror in the off-axis three mirror anastigmatic (TMA), the combined fabrication and testing technologies of the off-axis convex aspheric mirror were studied. Firstly‚ the optical parameters, technical specifications and overall processing route of square (298 mm×264 mm) high order off-axis convex aspheric mirror were introduced. Then, the grinding processing strategy and the combined processing technology based on bonnet and pitch polishing were presented. At last, offner-type compensator was used to meet the back transmission null lens testing in the polishing stage, and then the surface distortion was corrected by ray tracing method, the final RMS value was 0.025λ (λ=632.8 nm), which meet the target requirements. The above combined processing technology and back transmission null lens testing detection scheme can significantly improve the processing accuracy and efficiency of off-axis convex aspheric mirror.

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    Lirong Peng, Qiang Cheng, Xuefeng Zeng, Xiaoqin Zhou. Combined fabrication of high order off-axis convex aspheric mirror (invited)[J]. Infrared and Laser Engineering, 2022, 51(9): 20220611

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    Paper Information

    Category: Special issue—Ultra precision manufacture and testing technology of optical aspheric surface

    Received: Jul. 23, 2022

    Accepted: --

    Published Online: Jan. 6, 2023

    The Author Email: Cheng Qiang (chengq@ciomp.ac.cn)

    DOI:10.3788/IRLA20220611

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