Chinese Optics Letters, Volume. 9, Issue 9, 092201(2011)
Ultra-precision figuring using submerged jet polishing
A new removal optimization method called submerged jet polishing (SJP) is reported. Experiments are conducted to obtain the removal shape. Results of SJP indicate that a Gaussian shape removal function can be obtained and that the removal rate is sensitive to variations in the standoff distance. SJP is applied to the corrective figuring of a BK7 optical glass. The flatness is improved from photovolatic (PV) 0.066 \lambda to 0.024 \lambda (\lambda=632.8 nm) after three iterations, and the root mean square (RMS) value is improved from 0.013 \lambda to 0.00395 \lambda. The experimental result indicates that SJP has a capability for ultra-precision figuring and can be applied in polishing complex-shaped surfaces.
Get Citation
Copy Citation Text
Chunyan Shi, Jiahu Yuan, Fan Wu, Yongjian Wan. Ultra-precision figuring using submerged jet polishing[J]. Chinese Optics Letters, 2011, 9(9): 092201
Category: Optical Design and Fabrication
Received: Mar. 23, 2011
Accepted: Apr. 15, 2011
Published Online: Jun. 20, 2011
The Author Email: