Infrared and Laser Engineering, Volume. 51, Issue 9, 20220576(2022)

Sub-aperture stiching and CGH mixed compensation for the testing of large convex asphere (invited)

Hang Su1,2, Xiaokun Wang1,2, Qiang Cheng1,2, Lingzhong Li1,2, Jing Wang1,2, Wenyan Li1,2, Qiong Wu1,2, Wa Tang1,2, Xiao Luo1,2, and Xuejun Zhang1,2
Author Affiliations
  • 1Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences, Changchun 130033, China
  • 2Univesity of Chinese Academy of Sciences, Beijing 100049, China
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    In order to achieve high-precision testing of large convex asphere, a testing method combining sub-aperture stitching and computer generated hologram compensation is proposed. Because the asphericity of the center is small, the direct testing method of spherical wave is used; while the asphericity of the outer ring is large, the method of sub-aperture stitching and computer generated hologram (CGH) mixed compensation is used for measurement. Then, the center testing data and the outer ring testing data are stitched by the stitching algorithm to obtain the full-aperture surface shape. Combined with an example, a large convex asphere with a diameter of 540 mm is measured. The test results were compared with the Luphoscan testing results. The residual error of the two methods to test the RMS value of the surface is 0.019λ, and RMS value after subtracting the self-test aperture and stitching result point-to-point is 0.017λ. The results show that the method can achieve high-precision testing of large convex asphere.

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    Hang Su, Xiaokun Wang, Qiang Cheng, Lingzhong Li, Jing Wang, Wenyan Li, Qiong Wu, Wa Tang, Xiao Luo, Xuejun Zhang. Sub-aperture stiching and CGH mixed compensation for the testing of large convex asphere (invited)[J]. Infrared and Laser Engineering, 2022, 51(9): 20220576

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    Paper Information

    Category: Special issue—Ultra precision manufacture and testing technology of optical aspheric surface

    Received: Aug. 16, 2022

    Accepted: --

    Published Online: Jan. 6, 2023

    The Author Email:

    DOI:10.3788/IRLA20220576

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