Acta Optica Sinica, Volume. 31, Issue 6, 612003(2011)
Calibration of Oblique-Reflection Aberration in Point-Diffraction Interferometer for High-Precision Spherical Surface Testing
Based on the polarization effect of metal-dielectric reflector in the point-diffraction interferometer for high-precision spherical surface testing, the oblique-reflection wavefront aberration of beams with different polarizaed states at various aperture angles is analyzed in detail. According to the numerical simulation result, the characteristic of oblique-reflection phase shift introduced by metal-dielectric reflector is studied, based on which the corresponding calibration method is presented. The experimental validation with the point-diffraction interferometer for high-precision spherical surface testing is carried out. Experimental results indicate that the metal-dielectric reflector introduces various effects on the beams with different polarized states, and the oblique-reflection wavefront aberration can be calibrated by the proposed method, with the residual error peak-valley (PV) value dropping from 0.0452λ to 0.0194λ and root mean square (RMS) value from 0.0075λ to 0.0021λ (λ is wavelength).
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Wang Daodang, Yang Yongying, Chen Chen, Zhuo Yongmo. Calibration of Oblique-Reflection Aberration in Point-Diffraction Interferometer for High-Precision Spherical Surface Testing[J]. Acta Optica Sinica, 2011, 31(6): 612003
Category: Instrumentation, Measurement and Metrology
Received: Nov. 5, 2010
Accepted: --
Published Online: May. 18, 2011
The Author Email: Daodang Wang (wangdaodang@yahoo.com.cn)