Infrared and Laser Engineering, Volume. 50, Issue 12, 20210624(2021)
Study on measurement method of mirror reflection laser tracking interferometric length measurement
In the traceability of length standards of different sizes, in order to solve the problems of lack of effective error analysis and low measurement efficiency of mirror reflection laser tracking interferometric length measurement, the length measurement error caused by the plane mirror adjustment resolution and flatness was studied. The allowable range of plane mirror angle adjustment for different lengths was obtained. The model of mirror reflection laser tracking interferometry was established, and the source of measurement uncertainty of the model was analyzed. The influence of plane mirror angle adjustment was simulated. The length measurement comparison experiment of coordinate measuring machine and the plane mirror angle adjustment experiment were carried out. The experiment shows that the En verification result of length measurement comparison is less than 1, which proves the accuracy of length measurement uncertainty. Through the plane mirror angle adjustment experiment for different lengths, the measurement results with measurement uncertainty of 3
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Shaodong Ping, Yunxia Fu, Feng Zhang, Yu Ren, Ming Kong. Study on measurement method of mirror reflection laser tracking interferometric length measurement[J]. Infrared and Laser Engineering, 2021, 50(12): 20210624
Category: Photoelectric measurement
Received: Aug. 30, 2021
Accepted: --
Published Online: Feb. 9, 2022
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