Acta Optica Sinica, Volume. 41, Issue 3, 0313001(2021)

Extraction of Material Parameters by Transmission Spectra of AlGaN Film

Binbin Sheng1,2,3,4, Ling Wang1,2、*, Jintong Xu1,2, and Xiangyang Li1,2,3,4
Author Affiliations
  • 1State Key Laboratory of Transducer Technology, Shanghai Institute of Technical Physics, Chinese Academy of Sciences, Shanghai 200083, China
  • 2Key Laboratory of Infrared Imaging Materials and Detectors, Shanghai Institute of Technical Physics, Chinese Academy of Sciences, Shanghai 200083, China
  • 3School of Information Science and Technology, ShanghaiTech University, Shanghai 201210, China
  • 4University of Chinese Academy of Sciences, Beijing 100049, China
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    To study the optical properties of multilayer AlGaN films with high Al content and calculate the relevant optical parameters, we fitted the transmission spectra of two samples based on the method of the multilayer-film transfer matrix. According to the mechanism of the AlGaN materials absorbing the incident light on different wavelengths, considering the out-of-band weak absorption of the materials, we established an absorption coefficient model in the all-band range (200--800 nm). At the same time, the root mean square (RMS) parameter of surface roughness was introduced to characterize the effect of the surface roughness of the materials on the transmission spectra. Furthermore, the transmission spectra of two Al0.65Ga0.35N samples with different structural parameters were fitted by the proposed model, and the fitting results were in good agreement with the experimental results. The absorption coefficient of Al0.65Ga0.35N material in the all-band range provided reliable experimental data for the study of the response spectra of solar-blind UV detectors. Additionally, the parameters such as film thickness, refractive index, and surface roughness of the Al0.65Ga0.35N materials were also obtained.

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    Binbin Sheng, Ling Wang, Jintong Xu, Xiangyang Li. Extraction of Material Parameters by Transmission Spectra of AlGaN Film[J]. Acta Optica Sinica, 2021, 41(3): 0313001

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    Paper Information

    Category: Integrated Optics

    Received: Jul. 10, 2020

    Accepted: Aug. 31, 2020

    Published Online: Feb. 28, 2021

    The Author Email: Wang Ling (wangling@mail.sitp.ac.cn)

    DOI:10.3788/AOS202141.0313001

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