Semiconductor Optoelectronics, Volume. 42, Issue 1, 35(2021)
Study on Fabrication of Fiber F-P Pressure Sensor by CO2 Laser Melting Capillary End Face
A method for fabricating optical fiber Fabry-Perot (FP) pressure sensor by using CO2 laser to melt capillary end face is proposed. The F-P structure is composed of ordinary single-mode fiber (SMF) and a silicon film prepared based on the end face of a CO2 laser fusion capillary. In this paper, the manufacturing process and melting parameters of the silicon thin film are introduced in detail and performance tests are performed on the F-P pressure sensor. The results show that the fabricated fiber F-P sensor realizes good sensitivity and linearity to the pressure, obtaining a sensitivity of 16.37pm/kPa, and the linearity of 0.998.
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ZHANG Haoyue, LI Hong, MENG Fanyong, XU Tao, ZHU Lianqing. Study on Fabrication of Fiber F-P Pressure Sensor by CO2 Laser Melting Capillary End Face[J]. Semiconductor Optoelectronics, 2021, 42(1): 35
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Received: Nov. 23, 2020
Accepted: --
Published Online: Mar. 18, 2021
The Author Email: Lianqing ZHU (lqzhu_bistu@sina.com)