Acta Optica Sinica, Volume. 5, Issue 5, 461(1985)
Measurement of refractive-index dispersion of transparent films
Combining a single-wavelength ellipsometer with a spectrophotometer, we propose a method to measure refractive indices of dielectric films at any wavelength. "With phase thickness of the thin film properly selected, the error of the measurement may be as low as <1×10-2, enough for the usual thin-film design and deposition.
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ZHOU JIULIN. Measurement of refractive-index dispersion of transparent films[J]. Acta Optica Sinica, 1985, 5(5): 461