Acta Optica Sinica, Volume. 34, Issue s1, 104001(2014)

Technology and Performance of Metal-Semiconductor-Metal AlGaN/GaN Heterostructure Ultraviolet Photodetector

Yang Lechen1,2,3、*, Fu Kai2,3, Shi Xueshun1,4, Chen Kunfeng1, Li Ligong1,4, and Zhang Baoshun2,3
Author Affiliations
  • 1[in Chinese]
  • 2[in Chinese]
  • 3[in Chinese]
  • 4[in Chinese]
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    AlGaN/GaN heterostructure metal-semiconductor-metal (MSM) structure ultraviolet (UV) photodetector with Ni/Au electrodes is fabricated. Opto-electrical characteristics and current-voltage characteristics of the detector are investigated. It is found that the detector has two spectral response ranges. The peak response is 0.717 A/W at 288 nm and 0.641 A/W at 366 nm. The quantum efficiency is 308% at 288 nm and 217% at 366 nm.

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    Yang Lechen, Fu Kai, Shi Xueshun, Chen Kunfeng, Li Ligong, Zhang Baoshun. Technology and Performance of Metal-Semiconductor-Metal AlGaN/GaN Heterostructure Ultraviolet Photodetector[J]. Acta Optica Sinica, 2014, 34(s1): 104001

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    Paper Information

    Category: Detectors

    Received: Dec. 16, 2013

    Accepted: --

    Published Online: Aug. 18, 2014

    The Author Email: Lechen Yang (yanglechen@163.com)

    DOI:10.3788/aos201434.s104001

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