Acta Optica Sinica, Volume. 34, Issue s1, 104001(2014)
Technology and Performance of Metal-Semiconductor-Metal AlGaN/GaN Heterostructure Ultraviolet Photodetector
AlGaN/GaN heterostructure metal-semiconductor-metal (MSM) structure ultraviolet (UV) photodetector with Ni/Au electrodes is fabricated. Opto-electrical characteristics and current-voltage characteristics of the detector are investigated. It is found that the detector has two spectral response ranges. The peak response is 0.717 A/W at 288 nm and 0.641 A/W at 366 nm. The quantum efficiency is 308% at 288 nm and 217% at 366 nm.
Get Citation
Copy Citation Text
Yang Lechen, Fu Kai, Shi Xueshun, Chen Kunfeng, Li Ligong, Zhang Baoshun. Technology and Performance of Metal-Semiconductor-Metal AlGaN/GaN Heterostructure Ultraviolet Photodetector[J]. Acta Optica Sinica, 2014, 34(s1): 104001
Category: Detectors
Received: Dec. 16, 2013
Accepted: --
Published Online: Aug. 18, 2014
The Author Email: Lechen Yang (yanglechen@163.com)