Acta Photonica Sinica, Volume. 44, Issue 6, 623003(2015)
Low Power Variable Optical Attenuator Utilizing Hybrid Integrated SiON/Polymer Channel Waveguide Platform
By utilizing the opposite thermo-optic characteristics of silicon oxynitride and polymer materials,a hybrid integrated silicon oxynitride and polymer channel waveguide based variable optical attenuator with low power was proposed,which consisted of a polymer core and a silicon oxynitride cladding.A heater is deposited on the S-bend waveguide to form an active region so as to realize tunable optical power attenuation by utilizing thermo-optic effect.Theoretical results show that an optical attenuation of ~50 dB can be achieved with an applied electrical power of 3.6 mW.Experimental result shows an attenuation of 0~40 dB,correspondingly,a maximum temperature change of 70.4℃ ,and an insertion loss of 5.4 dB.
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SONG Qian-qian, LEI Jian-ping, CHEN Kai-xin. Low Power Variable Optical Attenuator Utilizing Hybrid Integrated SiON/Polymer Channel Waveguide Platform[J]. Acta Photonica Sinica, 2015, 44(6): 623003
Received: Dec. 30, 2014
Accepted: --
Published Online: Jun. 25, 2015
The Author Email: Qian-qian SONG (452344827@qq.com)