Laser & Optoelectronics Progress, Volume. 49, Issue 8, 80006(2012)
Parallel Confocal Microscopic Detection Technique and Its Research Progress
Confocal microscopy is an important imaging technique for micro structure, and it is widely used in micro-nano three-dimensional (3D) topographic measurement due to its high precision, high resolution and ease of use to realize 3D image reconstruction. In recent years, parallel confocal microscopy has attracted extensive attention of the worldwide experts. This technology substitutes a single point scanning pattern for synchronously multiple-beam parallel detection, greatly improving the 3D testing speed. The basic principle and the worldwide research progress of parallel confocal microscopy are reviewed and the author′s research in the field is briefly introduced. Introduction to seven categories is presented according to the parallel detection methods of parallel confocal microscopy, and the advantages and disadvantages of each type are pointed out. Finally, the existing technical difficulties are summarized and the development trend is analyzed to provide technical reference for further research in China.
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Tu Long, Yu Jin, Fan Zhongwei, Bian Qiang, Ge Wenqi, Liu Yang, Zhang Xue, Huang Ke, Nie Shuzhen, Li Han, Mo Zeqiang. Parallel Confocal Microscopic Detection Technique and Its Research Progress[J]. Laser & Optoelectronics Progress, 2012, 49(8): 80006
Category: Reviews
Received: Mar. 9, 2012
Accepted: --
Published Online: May. 7, 2012
The Author Email: Long Tu (tulong@aoe.ac.cn)